Equipment Engineer- Nanofabrication

Equipment Engineer- Nanofabrication

locationUnited States
PublishedPublished: 12/8/2023
Full Time


Equipment Engineer- Nanofabrication

Faculty of Arts and Sciences


Position Description

The Center for Nanoscale Systems (CNS) at Harvard University seeks a talented, enthusiastic individual to work within the nanofabrication facility as a senior equipment engineer, assisting operations of a diverse range of state-of-the-art fabrication equipment, and supporting the research applications of CNS users. Reporting to the Manager of the Nanofabrication Facility, this position’s duties and responsibilities include:

  • Provide technical expertise in equipment maintenance, tool capability enhancement, and troubleshooting to the component level for multiple pieces of process equipment and related nanofabrication tools, including physical vapor deposition, (sputtering, thermal/E-beam deposition), reactive ion etchers (RIE), plasma stripper, photolithography systems, various chemical vapor deposition (CVD) platforms, high-temperature furnaces.  Familiarity with high vacuum chambers and the use of toxic and/or flammable gases and chemical systems.
  • Work with CNS staff and critical users to design, implement and perform a successful preventative maintenance program throughout the facility to improve equipment reliability and performance. 
  • Work with CNS staff and participate in some special user research projects to evaluate, design, expand, and maintain the equipment capability and process recipes.
  • Be responsible for the installation and commissioning of new equipment,  including supervising facility construction, performing tool acceptance tests, and preparing tool logs. Coordinate and interface with the equipment vendors for tool inspection, repair, PM, and monitoring service contracts. 
  • Conduct user training in the areas of thin film deposition, thermal processes, dry etching, and other nanofabrication processes. Prepare training materials including SOPs and related documents.
  • As a member of Emergency Response Team (ERT), train users on best safety practices, and help to monitor laboratory safety compliance.

CNS is an open, shared-use facility that serves Harvard as well as external academic and industrial users. Collaboration with other CNS personnel to achieve objectives and enhance service quality is highly expected.

Basic Qualifications

  • Bachelor’s degree in an engineering or related field and a minimum of three years’ relevant work experience; or
  • A minimum of seven years of relevant work experience or equivalent combination of education and experience

Additional Qualifications and Skills

Graduate degree in Mechanical Engineering, Electrical Engineering, Surface Science, Physics, Material Science, Chemical Engineering, or a related field is desirable. Cleanroom fabrication experience, especially in film deposition (PVD, CVD, LPCVD, ALD), plasma etching (ICP, ECR, DRIE), lithography (photo and E-beam), high temperature and vacuum system, is highly desirable.  Excellent communication skills are required. The candidate should be self-motivated with a strong desire to acquire on-the-job training, to succeed, and to develop intellectual, and practical professional skills. Demonstrated ability to work well in teams is essential.

Physical Requirements

Must be able to work in cleanroom, chemical, and measurement laboratory environments. Will work around compressed gases, acids, solvents, vacuum pump oils, and other chemicals. Must be very dexterous; will be required to work on large and small assemblies.

Working Conditions

Research Lab and cleanroom

The health of our workforce is a priority for Harvard University. With that in mind, we strongly encourage all employees to be up-to-date on CDC-recommended vaccines.

Additional Information

This is a two-year term position with the possibility for renewal and/or extension to a non-term position contingent upon funding.

We are unable to provide visa sponsorship now or in the future

All formal written offers will be made by FAS Human Resources.


We invite you to visit Harvard’s Total Rewards website to learn more about our outstanding benefits package, which may include:

  • Paid Time Off: 3-4 weeks of accrued vacation time per year (3 weeks for support staff and 4 weeks for administrative/professional staff), 12 accrued sick days per year, 12.5 holidays plus a Winter Recess in December/January, 3 personal days per year (prorated based on date of hire), and up to 12 weeks of paid leave for new parents who are primary care givers.
  • Health and Welfare: Comprehensive medical, dental, and vision benefits, disability and life insurance programs, along with voluntary benefits. Most coverage begins as of your start date.
  • Work/Life and Wellness: Child and elder/adult care resources including on campus childcare centers, Employee Assistance Program, and wellness programs related to stress management, nutrition, meditation, and more.
  • Retirement: University-funded retirement plan with contributions from 5% to 15% of eligible compensation, based on age and earnings with full vesting after 3 years of service.
  • Tuition Assistance Program: Competitive program including $40 per class at the Harvard Extension School and reduced tuition through other participating Harvard graduate schools.
  • Tuition Reimbursement: Program that provides 75% to 90% reimbursement up to $5,250 per calendar year for eligible courses taken at other accredited institutions.
  • Professional Development: Programs and classes at little or no cost, including through the Harvard Center for Workplace Development and LinkedIn Learning.
  • Commuting and Transportation: Various commuter options handled through the Parking Office, including discounted parking, half-priced public transportation passes and pre-tax transit passes, biking benefits, and more.
  • Harvard Facilities Access, Discounts and Perks: Access to Harvard athletic and fitness facilities, libraries, campus events, credit union, and more, as well as discounts to various types of services (legal, financial, etc.) and cultural and leisure activities throughout metro-Boston.

Job Function


Department Office Location

USA - MA - Cambridge

Job Code

R0057P Research Core Engineer III

Work Format




Salary Grade



Center for Nanoscale Systems


00 - Non Union, Exempt or Temporary

Time Status


Pre-Employment Screening

Education, Identity


35 hours per week

Commitment to Equity, Diversity, Inclusion, and Belonging

Harvard University views equity, diversity, inclusion, and belonging as the pathway to achieving inclusive excellence and fostering a campus culture where everyone can thrive. We strive to create a community that draws upon the widest possible pool of talent to unify excellence and diversity while fully embracing individuals from varied backgrounds, cultures, races, identities, life experiences, perspectives, beliefs, and values.

EEO Statement

We are an equal opportunity employer and all qualified applicants will receive consideration for employment without regard to race, color, religion, sex, national origin, disability status, protected veteran status, gender identity, sexual orientation, pregnancy and pregnancy-related conditions, or any other characteristic protected by law.